Eminyakeni yamuva, ubuchwepheshe bezinzwa zezwe lami bukhula ngokushesha, futhi izinkambu zalo zohlelo lokusebenza ziyanda. Njengohlobo oluvuthiwe kakhulu lobuchwepheshe besimanjemanje, ubuchwepheshe obusha, izinto ezintsha nezinqubo ezintsha zivela njalo emkhakheni wezinzwa zengcindezi.
Inzwa yengcindezi idivaysi esetshenziselwa ukuthola amasiginali wengcindezi futhi uyiguqule ibe yizimpawu zikagesi ngokuya ngemithetho ethile. Kusetshenziswa kabanzi ekukhiqizeni okuhlukahlukene, izimboni zezimboni kanye ne-aerospace.the ukuhlukaniswa kwezinkambu zohlelo lokusebenza, ukulinganiswa kwengcindezi okufana nokushisa kwamafutha okushisa okushisa okuphezulu kanye nokushisa okusetshenziswa kakhulu, kanti izindawo zokushisa ezisetshenziswa kakhulu, ngenkathi kusetshenziswa izilinganiso ezisetshenziswayo ezinhlanganweni ezijwayelekile ze-silicon Psressus Sensor zingaphansi kuka-120 ° C). ° C) Sizokwehluleka, okuholele ekuhlulekeni kwengcindezi. Ngakho-ke, inzwa ephezulu yokucindezela kwengcindezi iba yindlela ebaluleke kakhulu yocwaningo.
Ukuhlukaniswa kwezinsizwa eziphakeme zokucindezela kwezingcindezi
Ngokuya ngezinto ezahlukahlukene ezisetshenzisiwe, izinzwa zengcindezi ephezulu kakhulu zingahlukaniswa nge-polysilicon (poly-si) izinzwa zokuhlola izinga lokushisa okushisa, i-SOS (Silicon on Sapfire Testures Sensor, i-SOS (Silicon on Sapfire) Izinzwa eziphakeme ze-Silicon-Sapphire) Izinzwa eziphakeme ze-Silicon-Sapphire), isimo sokuthuthuka samanje, isimo sokucwaninga namathemba Izinzwa eziphakeme ze-SOI high-yokushisa izicubu zihle kakhulu. Lokhu okulandelayo kwethula inzwa ephezulu ye-SOI Prestu yokushisa kwengcindezelo.
I-SOI ephezulu yokushisa inzwa
Ukuthuthukiswa kwama-SOI High-izinga lokuvikelwa kwezingcindezi zezinzwa kuncike ekukhuphukeni kwezinto zo-soi.SOI ku-silicon ku-secertterate areser eyenziwe nge-soi ye-SOI kanye ne-substrate tower. Ithuthukisa ukuthembeka kwedivayisi.Engezelwa, ngenxa yezici zokushisa okuphezulu ze-SOI yesendlalelo sedivaysi, iba yinto ekahle yokulungiselela izinzwa zokuhlola izinga lokushisa okuphezulu.
Njengamanje, izinzwa zokucindezela amazinga okushisa aphezulu ziye zathuthukiswa ngempumelelo phesheya, kanti izinga lokushisa lingu -55 ~ 480 ° C; the -55 ° 5 ° Coo high-izinga lesikhungo sezinzwa e-United States; Inzwa yengcindezi yokuhlola ukushisa ephezulu eyenziwe yi-French Ledi Institute futhi inesilinganiso sokusebenza sezikhungo zokucwaninga ezingaphezu kwama-400 ° C. Ngaphezu kwalokho, i-Fatri future future Technology Research Christion Institute ye-FATRI nayo yenza umsebenzi ohlobene nocwaningo, futhi iphrojekthi yamanje ifake isigaba sokubukisa.
Ukusebenza komgomo we-Soi High Tempereres Tessure Sensor
Ngokuyinhloko, inzwa ephezulu yokushisa kwengcindezi yokushisa isebenzisa kakhulu umphumela we-piezoresustive we-Silicon Crystal.Use isebenza ku-Silicon Crystal, okuholela ekushintsheni kwe-Silicon Crystal.Four Piezorestors kufakwa endaweni ethile kudivayisi ephezulu ungqimba wokwakha ibhuloho le-wheatstone njengoba kukhonjisiwe kuMfanekiso 2 (a); Ingcindezi yokubuyela emuva ifakwe kungqimba lwe-SOI substrate ungqimba ukwakha isakhiwo esibucayi sengcindezelo.
Umdwebo 2 (a) I-Wheatstone Bridge
Lapho i-Pressure-Encutive Straction incenation yomoya, ukumelana kwe-piezoresistor kushintsha, okubangela ukukhishwa kwe-voltage vout ukuze ushintshe, kanye nenani lokucindezela likalwa ngobudlelwano phakathi kwenani le-Piezoressor.
Inqubo Yokuceb ye-SOI ephezulu yokuvimbela ukucindezela kwengcindezelo
Inqubo yokulungiselela ye-SOI ephezulu yokucindezela kwengcindezelo ifaka izinqubo eziningi ze-MEMS. Ezinye izinyathelo ezibalulekile zilethwa lapha lapha ukuze ziqonde inqubo ye-sensor, ikakhulukazi ukulungiselela i-piezoresistor, ukulungiswa kwe-metal holy, ukulungiselela amafilimu okucindezela, kanye nokufakwa kwengcindezi yefilimu, nokufakelwa kwengcindezi yefilimu, nokufakelwa kwengcindezi yefilimu, nokufakelwa kwengcindezi yefilimu.
Isihluthulelo sokulungiselela ama-varistors silele ekuphathweni kokuhlushwa kwe-doping kanye nokwenza kahle kwenqubo elandelayo yokubumba yokubumba; Isendlalelo se-Metal Holy sisebenza ikakhulu njengokuxhumeka kwebhuloho le-Wheathstone; Ukulungiswa kwefilimu ebucayi yokucindezela kuncike kakhulu kwinqubo ejulile ye-silicon etching; Ukupakishwa kwe-cavity kuvame ukuhlukahluka ngokuya ngokusetshenziswa kwenzwa yengcindezelo,
Njengoba izinzwa zengcindezi eziphakeme ze-High Cletherment High Tessuments azikwazi ukufeza kahle izidingo zokulinganisa zokucindezela kwezindawo ezinokhahlo okukhethekile njengezinzwa eziphakeme zokushisa kanye nezimpawu eziphakeme zezinzwa eziphakemeyo kanye nezimpawu eziphakeme zokushisa, izinto ze-SOI ziye zaba yizinto ezifanele zezinzwa zokuhlola izinga lokushisa. Ucwaningo lwesikhathi esizayo ku-SOI high-izinga lokushisa lwengcindezi kufanele lugxile ekuxazululeni ukuqina kwesikhathi eside nezinkinga zokuzikhandla kwezinzwa eziphansi zokushisa ezishisa nasekuthuthukiseni ukunemba kwezinzwa zengcindezi. isici.
Vele, ukufika kwe-ERA ehlakaniphile nakho kudinga izinzwa zokuhlola izinga lokushisa kwe-SOI ezihlanganiswe nobuchwepheshe obuhle kakhulu ukuletha imisebenzi ehlakaniphile, ukuze uzilinganise, kanye nokuqedela umsebenzi wokuzwakala kwenzwa yokushisa okuyinkimbinkimbi. .
Isikhathi sePosi: Feb-13-2023